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Nano Research

Article Title

Improved conductivity and capacitance of interdigital carbon microelectrodes through integration with carbon nanotubes for micro-supercapacitors

Authors

Yanjuan Yang, State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, China
Liang He, State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, China
Chunjuan Tang, State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, China Department of Mathematics and Physics, Luoyang Institute of Science and Technology, Luoyang 471023, China
Ping Hu, State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, China
Xufeng Hong, State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, China
Mengyu Yan, State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, China
Yixiao Dong, State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, China
Xiaocong Tian, State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, China
Qiulong Wei, State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, China
Liqiang Mai, State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, China

Keywords

photolithography, supercapacitors, pyrolysis, microelectromechanicalsystem (MEMS), carbon nanotubes

Abstract

In the last decade, pyrolyzed-carbon-based composites have attracted muchattention for their applications in micro-supercapacitors. Although variousmethods have been investigated to improve the performance of pyrolyzedcarbons, such as conductivity, energy storage density and cycling performance,effective methods for the integration and mass-production of pyrolyzed-carbonbasedcomposites on a large scale are lacking. Here, we report the developmentof an optimized photolithographic technique for the fine micropatterningof photoresist/chitosan-coated carbon nanotube (CHIT-CNT) composite. Aftersubsequent pyrolysis, the fabricated carbon/CHIT-CNT microelectrode-basedmicro-supercapacitor has a high capacitance (6.09 mF·cm–2) and energy density(4.5 mWh·cm–3) at a scan rate of 10 mV·s–1. Additionally, the micro-supercapacitorhas a remarkable long-term cyclability, with 99.9% capacitance retention after10,000 cyclic voltammetry cycles. This design and microfabrication process allowthe application of carbon microelectromechanical system (C-MEMS)-basedmicro-supercapacitors due to their high potential for enhancing the mechanicaland electrochemical performance of micro-supercapacitors.

Graphical Abstract

Publisher

Tsinghua University Press

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