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Nano Research

Article Title

Is quantum capacitance in graphene a potential hurdle for device scaling?

Authors

Jaeho Lee, Samsung Advanced Institute of Technology, Samsung Electronics, Yongin-Si, Gyeonggi-Do 446-712, Korea Inter-University Semiconductor Research Center (ISRC), School of Electrical Engineering and Computer Science, Seoul National University, Seoul 151-742, Korea
Hyun-Jong Chung, Samsung Advanced Institute of Technology, Samsung Electronics, Yongin-Si, Gyeonggi-Do 446-712, Korea Division of Quantum Phases and Devices, Department of Physics, Konkuk University, Seoul 143-701, Korea
David H. Seo, Samsung Advanced Institute of Technology, Samsung Electronics, Yongin-Si, Gyeonggi-Do 446-712, Korea
Jaehong Lee, Inter-University Semiconductor Research Center (ISRC), School of Electrical Engineering and Computer Science, Seoul National University, Seoul 151-742, Korea Semiconductor R&D Center, Samsung Electronics, Hwasung-City, Gyeonggi-Do 446-711, Korea
Hyungcheol Shin, Inter-University Semiconductor Research Center (ISRC), School of Electrical Engineering and Computer Science, Seoul National University, Seoul 151-742, Korea
Sunae Seo, Samsung Advanced Institute of Technology, Samsung Electronics, Yongin-Si, Gyeonggi-Do 446-712, Korea Department of Physics, Sejong University, Seoul 143-747, Korea
Seongjun Park, Samsung Advanced Institute of Technology, Samsung Electronics, Yongin-Si, Gyeonggi-Do 446-712, Korea
Sungwoo Hwang, Samsung Advanced Institute of Technology, Samsung Electronics, Yongin-Si, Gyeonggi-Do 446-712, Korea
Kinam Kim, Samsung Advanced Institute of Technology, Samsung Electronics, Yongin-Si, Gyeonggi-Do 446-712, Korea Memory Division, Samsung Electronics, Hwasung-City, Gyeonggi-Do 446-711, Korea

Keywords

graphene, equivalent circuit, quantum capacitance, intrinsic delay

Abstract

Transistor size is constantly being reduced to improve performance as well as power consumption. For the channel length to be reduced, the corresponding gate dielectric thickness should also be reduced. Unfortunately, graphene devices are more complicated due to an extra capacitance called quantum capacitance (CQ) which limits the effective gate dielectric reduction. In this work, we analyzed the effect of CQ on device-scaling issues by extracting it from scaling of the channel length of devices. In contrast to previous reports for metal–insulator– metal structures, a practical device structure was used in conjunction with direct radio-frequency field-effect transistor measurements to describe the graphene channels. In order to precisely extract device parameters, we reassessed the equivalent circuit, and concluded that the on-state model should in fact be used. By careful consideration of the underlap region, our device modeling was shown to be in good agreement with the experimental data. CQ contributions to equivalent oxide thickness were analyzed in detail for varying impurity concentrations in graphene. Finally, we were able to demonstrate that despite contributions from CQ, graphene’s high mobility and low-voltage operation allows for graphene channels suitable for next generation transistors.

Graphical Abstract

Publisher

Tsinghua University Press

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