Article Title

Schottky barrier-based silicon nanowire pH sensor with live sensitivity control

Authors

Felix M. Zrgiebel, Institute for Materials Science and Max Bergmann Center of Biomaterials, TU Dresden, 01062 Dresden, Germany Dresden, Germany, Center for Advancing Electronics Dresden, TU Dresden, 01062 Dresden, Germany
Sebastian Pregl, Institute for Materials Science and Max Bergmann Center of Biomaterials, TU Dresden, 01062 Dresden, Germany Dresden, Germany, Center for Advancing Electronics Dresden, TU Dresden, 01062 Dresden, Germany
Lotta Rmhildt, Institute for Materials Science and Max Bergmann Center of Biomaterials, TU Dresden, 01062 Dresden, Germany
Jrg Opitz, Fraunhofer Institute IZFP Dresden, 01109 Dresden, Germany
W. Weber, NaMLab GmbH, 01187 Dresden, Germany Dresden, Germany, Center for Advancing Electronics Dresden, TU Dresden, 01062 Dresden, Germany
T. Mikolajick, Institute for Semiconductors and Microsystems Technology, TU Dresden, 01187 Dresden, Germany Dresden, Germany, Center for Advancing Electronics Dresden, TU Dresden, 01062 Dresden, Germany
Larysa Baraban, Institute for Materials Science and Max Bergmann Center of Biomaterials, TU Dresden, 01062 Dresden, Germany
Gianaurelio Cuniberti, Institute for Materials Science and Max Bergmann Center of Biomaterials, TU Dresden, 01062 Dresden, Germany Dresden, Germany, Center for Advancing Electronics Dresden, TU Dresden, 01062 Dresden, Germany

Keywords

silicon nanowires, field effect transistor, sub-threshold regime, nanosensors, pH sensor, bottom-up fabrication, maximum sensitivity of sensor

Abstract

ABSTRACT We demonstrate a pH sensor based on ultrasensitive nanosize Schottky junctions formed within bottom-up grown dopant-free arrays of assembled silicon nanowires. A new measurement concept relying on a continuous gate sweep is presented, which allows the straightforward determination of the point of maximum sensitivity of the device and allows sensing experiments to be performed in the optimum regime. Integration of devices into a portable fluidic system and an electrode isolation strategy affords a stable environment and enables long time robust FET sensing measurements in a liquid environment to be carried out. Investigations of the physical and chemical sensitivity of our devices at different pH values and a comparison with theoretical limits are also discussed. We believe that such a combination of nanofabrication and engineering advances make this Schottky barrier-powered silicon nanowire lab-on-a-chip platform suitable for efficient biodetection and even for more complex biochemical analysis.

Graphical Abstract

DOI

https://doi.org/10.1007/s12274-013-0393-8

Publisher

Tsinghua University Press

Recommended Citation

Felix M. Zörgiebel,Sebastian Pregl,Lotta Römhildt,Jörg Opitz,W. Weber,T. Mikolajick,Larysa Baraban,Gianaurelio Cuniberti, Schottky barrier-based silicon nanowire pH sensor with live sensitivity control. NanoRes.2014, 7(2): 263–271