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Nano Research

Article Title

Thickness-dependent patterning of MoS2 sheets with well-oriented triangular pits by heating in air

Authors

Haiqing Zhou, Division of Physics and Applied Physics, School of Physical and Mathematical Sciences, Nanyang Technological University, 637371, Singapore Department of Chemistry, Rice University, 6100 Main Street, Houston, Texas 77005, USA
Fang Yu, National Center for Nanoscience and Technology, Beijing 100190, China
Yuanyue Liu, The Smalley Institute for Nanoscale Science and Technology, Rice University, 6100 Main Street, Houston, Texas 77005, USA Department of Mechanical Engineering and Materials Science, Rice University, 6100 Main Street, Houston, Texas 77005, USA
Xiaolong Zou, The Smalley Institute for Nanoscale Science and Technology, Rice University, 6100 Main Street, Houston, Texas 77005, USA Department of Mechanical Engineering and Materials Science, Rice University, 6100 Main Street, Houston, Texas 77005, USA
Chunxiao Cong, Division of Physics and Applied Physics, School of Physical and Mathematical Sciences, Nanyang Technological University, 637371, Singapore
Caiyu Qiu, Division of Physics and Applied Physics, School of Physical and Mathematical Sciences, Nanyang Technological University, 637371, Singapore
Ting Yu, Division of Physics and Applied Physics, School of Physical and Mathematical Sciences, Nanyang Technological University, 637371, Singapore
Zheng Yan, Department of Chemistry, Rice University, 6100 Main Street, Houston, Texas 77005, USA
Xiaonan Shen, Division of Physics and Applied Physics, School of Physical and Mathematical Sciences, Nanyang Technological University, 637371, Singapore
Lianfeng Sun, National Center for Nanoscience and Technology, Beijing 100190, China
Boris I. Yakobson, Department of Chemistry, Rice University, 6100 Main Street, Houston, Texas 77005, USA The Smalley Institute for Nanoscale Science and Technology, Rice University, 6100 Main Street, Houston, Texas 77005, USA Department of Mechanical Engineering and Materials Science, Rice University, 6100 Main Street, Houston, Texas 77005, USA
James M. Tour, Department of Chemistry, Rice University, 6100 Main Street, Houston, Texas 77005, USA The Smalley Institute for Nanoscale Science and Technology, Rice University, 6100 Main Street, Houston, Texas 77005, USA Department of Mechanical Engineering and Materials Science, Rice University, 6100 Main Street, Houston, Texas 77005, USA

Keywords

layered MoS2, oxidative etching, thickness-dependent, triangular pits

Abstract

Patterning ultrathin MoS2 layers with regular edges or controllable shapes is appealing since the properties of MoS2 sheets are sensitive to the edge structures. In this work, we have introduced a simple, effective and well-controlled technique to etch layered MoS2 sheets with well-oriented equilateral triangular pits by simply heating the samples in air. The anisotropic oxidative etching is greatly affected by the surrounding temperature and the number of MoS2 layers, whereby the pit sizes increase with the increase of surrounding temperature and the number of MoS2 layers. First-principles computations have been performed to explain the formation mechanism of the triangular pits. This technique offers an alternative avenue to engineering the structure of MoS2 sheets.

Graphical Abstract

Publisher

Tsinghua University Press

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