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Nano Research

Article Title

Studies of graphene-based nanoelectromechanical switches

Authors

Zhiwen Shi, Beijing National Laboratory for Condensed Matter Physics and Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China
Hongliang Lu, Beijing National Laboratory for Condensed Matter Physics and Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China
Lianchang Zhang, Beijing National Laboratory for Condensed Matter Physics and Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China
Rong Yang, Beijing National Laboratory for Condensed Matter Physics and Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China
Yi Wang, Beijing National Laboratory for Condensed Matter Physics and Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China
Donghua Liu, Beijing National Laboratory for Condensed Matter Physics and Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China
Haiming Guo, Beijing National Laboratory for Condensed Matter Physics and Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China
Dongxia Shi, Beijing National Laboratory for Condensed Matter Physics and Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China
Hongjun Gao, Beijing National Laboratory for Condensed Matter Physics and Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China
Enge Wang, International Centre of Quantum Materials, School of Physics, Peking University, Beijing 100871, China
Guangyu Zhang, Beijing National Laboratory for Condensed Matter Physics and Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China

Keywords

Suspended graphene, electrostatic force, van der Waals force, nanoelectromechanical systems (NEMS), scanning tunneling microscope (STM), atomic force microscopy (AFM)

Abstract

ABSTRACT Electromechanical switch devices employing suspended graphene as movable elements have been developed. Their on and off states can be controlled by modulating the electrostatic force applied to the graphene. The devices exhibit on–off ratios of up to 104 and lifetimes of over 500 cycles. The prototype device demonstrates the feasibility of using multilayer graphene in electromechanical systems. Measurements of the mechanical properties of the free-standing monolayer graphene gave a value of 0.96 TPa for the Young’s modulus and a van der Waals force with silicon oxide of 0.17 nN/nm2.

Graphical Abstract

Publisher

Tsinghua University Press

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