Article Title

Biomimetic corrugated silicon nanocone arrays for self-cleaning antireflection coatings

Authors

Yandong Wang, State Key Laboratory of Supramolecular Structure and Materials, Jilin University, Changchun 130012, China
Nan Lu, State Key Laboratory of Supramolecular Structure and Materials, Jilin University, Changchun 130012, China
Hongbo Xu, State Key Laboratory of Supramolecular Structure and Materials, Jilin University, Changchun 130012, China
Gang Shi, State Key Laboratory of Supramolecular Structure and Materials, Jilin University, Changchun 130012, China
Miaojun Xu, State Key Laboratory of Supramolecular Structure and Materials, Jilin University, Changchun 130012, China
Xiaowen Lin, National Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210093, China
Haibo Li, State Key Laboratory of Supramolecular Structure and Materials, Jilin University, Changchun 130012, China
Wentao Wang, State Key Laboratory of Supramolecular Structure and Materials, Jilin University, Changchun 130012, China
Dianpeng Qi, State Key Laboratory of Supramolecular Structure and Materials, Jilin University, Changchun 130012, China
Yanqing Lu, National Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210093, China
Lifeng Chi, State Key Laboratory of Supramolecular Structure and Materials, Jilin University, Changchun 130012, China Physikalisches Institut and Center for Nanotechnology (CeNTech), Westflische Wilhelms-Universitt, D-48149 Münster, Germany

Keywords

Antireflection, silicon nancone (SiNC) arrays, reactive ion etching, nanosphere lithography, superhydrophobic

Abstract

Corrugated silicon nanocone (SiNC) arrays have been fabricated on a silicon wafer by two polystyrene-sphere- monolayer-masked etching steps in order to create high-performance antireflective coatings. The reflectance was reduced from above 35% to less than 0.7% in the range 400–1050 nm, and it remained below 0.5% at incidence angles up to 70° at 632.8 nm for both s- and p-polarized light. The fluorinated corrugated SiNC array surface exhibits superhydrophobic properties with a water contact angle of 164°.

Graphical Abstract

DOI

https://doi.org/10.1007/s12274-010-0012-x

Publisher

Tsinghua University Press

Recommended Citation

Yandong Wang,Nan Lu,Hongbo Xu,Gang Shi,Miaojun Xu,Xiaowen Lin,Haibo Li,Wentao Wang,Dianpeng Qi,Yanqing Lu,Lifeng Chi, Biomimetic corrugated silicon nanocone arrays for self-cleaning antireflection coatings. NanoRes.2010, 3: 520–527