•  
  •  
 
Nano Research

Article Title

Low-temperature epitaxy of transferable high-quality Pd(111) films on hybrid graphene/Cu(111) substrate

Authors

Zhihong Zhang, State Key Laboratory for Mesoscopic Physics, International Centre for Quantum Materials, Collaborative Innovation Centre of Quantum Matter, School of Physics, Academy for Advanced Interdisciplinary Studies, Peking University, Beijing 100871, China Physical Science Laboratory, Huairou National Comprehensive Science Centre, Beijing 101400, China
Xiaozhi Xu, State Key Laboratory for Mesoscopic Physics, International Centre for Quantum Materials, Collaborative Innovation Centre of Quantum Matter, School of Physics, Academy for Advanced Interdisciplinary Studies, Peking University, Beijing 100871, China School of Physics and Telecommunication Engineering, South China Normal University, Guangzhou 510631, China
Ruixi Qiao, State Key Laboratory for Mesoscopic Physics, International Centre for Quantum Materials, Collaborative Innovation Centre of Quantum Matter, School of Physics, Academy for Advanced Interdisciplinary Studies, Peking University, Beijing 100871, China
Junjiang Liu, Department of Materials Science and Engineering, College of Engineering, Peking University, Beijing 100871, China
Yuxia Feng, State Key Laboratory for Mesoscopic Physics, International Centre for Quantum Materials, Collaborative Innovation Centre of Quantum Matter, School of Physics, Academy for Advanced Interdisciplinary Studies, Peking University, Beijing 100871, China
Zhibin Zhang, State Key Laboratory for Mesoscopic Physics, International Centre for Quantum Materials, Collaborative Innovation Centre of Quantum Matter, School of Physics, Academy for Advanced Interdisciplinary Studies, Peking University, Beijing 100871, China
Peizhao Song, State Key Laboratory for Mesoscopic Physics, International Centre for Quantum Materials, Collaborative Innovation Centre of Quantum Matter, School of Physics, Academy for Advanced Interdisciplinary Studies, Peking University, Beijing 100871, China
Muhong Wu, State Key Laboratory for Mesoscopic Physics, International Centre for Quantum Materials, Collaborative Innovation Centre of Quantum Matter, School of Physics, Academy for Advanced Interdisciplinary Studies, Peking University, Beijing 100871, China Songshan Lake Materials Laboratory, Institute of Physics, Chinese Academy of Sciences, Guangdong 523808, China
Lan Zhu, Peking Union Medical College Hospital, Beijing 100730, China
Xuelin Yang, State Key Laboratory for Mesoscopic Physics, International Centre for Quantum Materials, Collaborative Innovation Centre of Quantum Matter, School of Physics, Academy for Advanced Interdisciplinary Studies, Peking University, Beijing 100871, China
Peng Gao, State Key Laboratory for Mesoscopic Physics, International Centre for Quantum Materials, Collaborative Innovation Centre of Quantum Matter, School of Physics, Academy for Advanced Interdisciplinary Studies, Peking University, Beijing 100871, China
Lei Liu, Department of Materials Science and Engineering, College of Engineering, Peking University, Beijing 100871, China
Jie Xiong, State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China
Enge Wang, State Key Laboratory for Mesoscopic Physics, International Centre for Quantum Materials, Collaborative Innovation Centre of Quantum Matter, School of Physics, Academy for Advanced Interdisciplinary Studies, Peking University, Beijing 100871, China Physical Science Laboratory, Huairou National Comprehensive Science Centre, Beijing 101400, China Songshan Lake Materials Laboratory, Institute of Physics, Chinese Academy of Sciences, Guangdong 523808, China
Kaihui Liu, State Key Laboratory for Mesoscopic Physics, International Centre for Quantum Materials, Collaborative Innovation Centre of Quantum Matter, School of Physics, Academy for Advanced Interdisciplinary Studies, Peking University, Beijing 100871, China

Keywords

single-crystal metal film, graphene/Cu(111) substrate, interfacial interactions, meter scale

Abstract

The continuous pursuit of miniaturization in the electronics and optoelectronics industry demands all device components with smaller size and higher performance, in which thin metal film is one heart material as conductive electrodes. However, conventional metal films are typically polycrystalline with random domain orientations and various grain boundaries, which greatly degrade their mechanical, thermal and electrical properties. Hence, it is highly demanded to produce single-crystal metal films with epitaxy in an appealing route. Traditional epitaxy on non-metal single-crystal substrates has difficulty in exfoliating away due to the formation of chemical bonds. Newly developed epitaxy on single-crystal graphene enables the easy exfoliation of epilayers but the annealing temperature must be high (typical 500–1,000 °C and out of the tolerant range of integrated circuit technology) due to the relative weak interfacial interactions. Here we demonstrate the facile production of 6-inch transferable high-quality Pd(111) films on single-crystal hybrid graphene/Cu(111) substrate with CMOS-compatible annealing temperature of 150 °C only. The interfacial interaction between Pd and hybrid graphene/Cu(111) substrate is strong enough to enable the low-temperature epitaxy of Pd(111) films and weak enough to facilitate the easy film release from substrate. The obtained Pd(111) films possess superior properties to polycrystalline ones with ~ 0.25 eV higher work function and almost half sheet resistance. This technique is proved to be applicable to other metals, such as Au and Ag. As the single-crystal graphene/Cu(111) substrates are obtained from industrial Cu foils and accessible in meter scale, our work will promote the massive applications of large-area high-quality metal films in the development of next-generation electronic and optoelectronic devices.

Graphical Abstract

Publisher

Tsinghua University Press

Share

COinS