Soft thermal nanoimprint lithography using a nanocomposite mold
soft lithography, nanoimprint lithography, PDMS, non-planar substrates
ABSTRACT Soft nanoimprint lithography has been limited to ultraviolet (UV) curable resists. Here, we introduce a novel approach for soft thermal nanoimprinting. This unprecedented combination of the terms “soft” and “thermal” for nanoimprinting became possible thanks to an innovative nanocomposite mold consisting of a flexible polydimethylsiloxane (PDMS) substrate with chemically attached rigid relief features. We used soft thermal nanoimprinting to produce high-resolution nanopatterns with a sub-100 nm feature size. Furthermore, we demonstrate the applicability of our nanoimprint approach for the nanofabrication of thermally imprinted nanopatterns on non-planar surfaces such as lenses. Our new nanofabrication strategy paves the way to numerous applications that require the direct fabrication of functional nanostructures on unconventional substrates.
Tsinghua University Press
Viraj Bhingardive,Liran Menahem,Mark Schvartzman, Soft thermal nanoimprint lithography using a nanocomposite mold. NanoRes.2018, 11(5): 2705–2714