Stressed carbon nanotube devices for high tunability, high quality factor, single mode GHz resonators
carbon nanotube, nanomechanical resonator, stress, high tunability, high frequency
ABSTRACT The emerging applications of nanoelectromechanical systems (NEMS) in ground-state cooling, quantum manipulation, communication devices, etc., call for a nanoresonator with high frequency, quality factor, and tunability, as well as easy integration. Here we show that such a nanoresonator can be achieved by using a unique assembly technique that transfers the stressed inner shell of carbon nanotubes (CNTs) to a self-aligned device geometry. The as-fabricated nanoresonator shows excellent comprehensive performance, i.e., high frequency (2–3 GHz), high tunability (80–110 MHz/V), high quality factor (3 × 104), and single mode operation. The defect-free nature of the inner shell of the CNT gives rise to a high quality factor, and the preloaded tension improves the resonant frequency and tunability. This resonator with excellent performance also enables the integration of homogeneous devices and will play a key role in the emerging applications of NEMS.
Tsinghua University Press
Xinhe Wang,Dong Zhu,Xinhe Yang,Long Yuan,Haiou Li,Jiangtao Wang,Mo Chen,Guangwei Deng,Wenjie Liang,Qunqing Li,Shoushan Fan,Guoping Guo,Kaili Jiang, Stressed carbon nanotube devices for high tunability, high quality factor, single mode GHz resonators. NanoRes.2018, 11(11): 5812–5822