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Nano Research

Article Title

Stressed carbon nanotube devices for high tunability, high quality factor, single mode GHz resonators

Authors

Xinhe Wang, State Key Laboratory of Low-Dimensional Quantum Physics, Dept. of Physics and Tsinghua-Foxconn Nanotechnology Research Center, Tsinghua University, Beijing 100084, China Fert Beijing Research Institute, School of Electrical and Information Engineering, BDBC, Beihang University, Beijing 100191, China Collaborative Innovation Center of Quantum Matter, Beijing 100084, China
Dong Zhu, Key Laboratory of Quantum Information, CAS, University of Science and Technology of China, Hefei 230026, China
Xinhe Yang, State Key Laboratory of Low-Dimensional Quantum Physics, Dept. of Physics and Tsinghua-Foxconn Nanotechnology Research Center, Tsinghua University, Beijing 100084, China Collaborative Innovation Center of Quantum Matter, Beijing 100084, China
Long Yuan, Key Laboratory of Quantum Information, CAS, University of Science and Technology of China, Hefei 230026, China
Haiou Li, Key Laboratory of Quantum Information, CAS, University of Science and Technology of China, Hefei 230026, China
Jiangtao Wang, State Key Laboratory of Low-Dimensional Quantum Physics, Dept. of Physics and Tsinghua-Foxconn Nanotechnology Research Center, Tsinghua University, Beijing 100084, China Collaborative Innovation Center of Quantum Matter, Beijing 100084, China
Mo Chen, State Key Laboratory of Low-Dimensional Quantum Physics, Dept. of Physics and Tsinghua-Foxconn Nanotechnology Research Center, Tsinghua University, Beijing 100084, China
Guangwei Deng, Key Laboratory of Quantum Information, CAS, University of Science and Technology of China, Hefei 230026, China
Wenjie Liang, Institute of Physics, Chinese Academy of Sciences, Beijing 100080, China
Qunqing Li, State Key Laboratory of Low-Dimensional Quantum Physics, Dept. of Physics and Tsinghua-Foxconn Nanotechnology Research Center, Tsinghua University, Beijing 100084, China Collaborative Innovation Center of Quantum Matter, Beijing 100084, China
Shoushan Fan, State Key Laboratory of Low-Dimensional Quantum Physics, Dept. of Physics and Tsinghua-Foxconn Nanotechnology Research Center, Tsinghua University, Beijing 100084, China Collaborative Innovation Center of Quantum Matter, Beijing 100084, China
Guoping Guo, Key Laboratory of Quantum Information, CAS, University of Science and Technology of China, Hefei 230026, China
Kaili Jiang, State Key Laboratory of Low-Dimensional Quantum Physics, Dept. of Physics and Tsinghua-Foxconn Nanotechnology Research Center, Tsinghua University, Beijing 100084, China Collaborative Innovation Center of Quantum Matter, Beijing 100084, China

Keywords

carbon nanotube, nanomechanical resonator, stress, high tunability, high frequency

Abstract

ABSTRACT The emerging applications of nanoelectromechanical systems (NEMS) in ground-state cooling, quantum manipulation, communication devices, etc., call for a nanoresonator with high frequency, quality factor, and tunability, as well as easy integration. Here we show that such a nanoresonator can be achieved by using a unique assembly technique that transfers the stressed inner shell of carbon nanotubes (CNTs) to a self-aligned device geometry. The as-fabricated nanoresonator shows excellent comprehensive performance, i.e., high frequency (2–3 GHz), high tunability (80–110 MHz/V), high quality factor (3 × 104), and single mode operation. The defect-free nature of the inner shell of the CNT gives rise to a high quality factor, and the preloaded tension improves the resonant frequency and tunability. This resonator with excellent performance also enables the integration of homogeneous devices and will play a key role in the emerging applications of NEMS.

Graphical Abstract

Publisher

Tsinghua University Press

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