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Nano Research

Article Title

Scanning electron microscopy imaging of single-walled carbon nanotubes on substrates

Authors

Dongqi Li, State Key Laboratory of Low-Dimensional Quantum Physics, Department of Physics and Tsinghua-Foxconn Nanotechnology Research Center, Tsinghua University, Beijing 100084, China
Jin Zhang, State Key Laboratory of Low-Dimensional Quantum Physics, Department of Physics and Tsinghua-Foxconn Nanotechnology Research Center, Tsinghua University, Beijing 100084, China
Yujun He, Sunwoda Electronic Co. Ltd., Shenzhen 518108, China Graduate School at Shenzhen, Tsinghua University, Shenzhen 518055, China
Yan Qin, Carl Zeiss Shanghai Co., Ltd. Beijing Office, No. 1221, North Area, Building B, 768 Creative Industry Park, A-5 Xueyuan Rd., Haidian Dist., Beijing 100083, China
Yang Wei, State Key Laboratory of Low-Dimensional Quantum Physics, Department of Physics and Tsinghua-Foxconn Nanotechnology Research Center, Tsinghua University, Beijing 100084, China
Peng Liu, State Key Laboratory of Low-Dimensional Quantum Physics, Department of Physics and Tsinghua-Foxconn Nanotechnology Research Center, Tsinghua University, Beijing 100084, China
Lina Zhang, State Key Laboratory of Low-Dimensional Quantum Physics, Department of Physics and Tsinghua-Foxconn Nanotechnology Research Center, Tsinghua University, Beijing 100084, China
Jiaping Wang, State Key Laboratory of Low-Dimensional Quantum Physics, Department of Physics and Tsinghua-Foxconn Nanotechnology Research Center, Tsinghua University, Beijing 100084, China Collaborative Innovation Center of Quantum Matter, Beijing 100084, China
Qunqing Li, State Key Laboratory of Low-Dimensional Quantum Physics, Department of Physics and Tsinghua-Foxconn Nanotechnology Research Center, Tsinghua University, Beijing 100084, China Collaborative Innovation Center of Quantum Matter, Beijing 100084, China
Shoushan Fan, State Key Laboratory of Low-Dimensional Quantum Physics, Department of Physics and Tsinghua-Foxconn Nanotechnology Research Center, Tsinghua University, Beijing 100084, China Collaborative Innovation Center of Quantum Matter, Beijing 100084, China
Kaili Jiang, State Key Laboratory of Low-Dimensional Quantum Physics, Department of Physics and Tsinghua-Foxconn Nanotechnology Research Center, Tsinghua University, Beijing 100084, China Collaborative Innovation Center of Quantum Matter, Beijing 100084, China

Keywords

single-walled carbon nanotube, scanning electron microscopy, imaging, surface charging

Abstract

ABSTRACT Scanning electron microscopy (SEM) plays an indispensable role in nanoscience and nanotechnology because of its high efficiency and high spatial resolution in characterizing nanomaterials. Recent progress indicates that the contrast arising from different conductivities or bandgaps can be observed in SEM images if single-walled carbon nanotubes (SWCNTs) are placed on a substrate. In this study, we use SWCNTs on different substrates as model systems to perform SEM imaging of nanomaterials. Substantial SEM observations are conducted at both high and low acceleration voltages, leading to a comprehensive understanding of the effects of the imaging parameters and substrates on the material and surface-charge signals, as well as the SEM imaging. This unified picture of SEM imaging not only furthers our understanding of SEM images of SWCNTs on a variety of substrates but also provides a basis for developing new imaging recipes for other important nanomaterials used in nanoelectronics and nanophotonics.

Graphical Abstract

Publisher

Tsinghua University Press

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