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Nano Research

Article Title

Microstructuring of carbon/tin quantum dots via a novel photolithography and pyrolysis-reduction process

Authors

Xufeng Hong, State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, China
Liang He, State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, China Department of Materials Science and NanoEngineering, Rice University, Houston, TX 77005, USA
Xinyu Ma, State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, China
Wei Yang, State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, China
Yiming Chen, State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, China
Lei Zhang, State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, China
Haowu Yan, State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, China
Zhaohuai Li, State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, China
Liqiang Mai, State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, China Department of Chemistry, University of California, Berkeley, CA 94720, USA

Keywords

carbon, micro-supercapacitors, quantum dots, photolithography, microdevices

Abstract

ABSTRACT A novel microfabrication process based on optimized photolithography combined with pyrolysis-reduction is proposed to fabricate interdigital porous carbon/tin quantum dots (C/Sn QDs) microelectrodes. C/Sn QDs active microelectrodes are also employed as current collectors of a micro-supercapacitor (MSC). A uniform dispersion of Sn QDs (diameter of ~3 nm) in the carbon matrix is achieved using our facile and controllable microfabrication process. The as-fabricated C/Sn QDs MSC obtained by carbonization at 900 °C exhibits a higher areal specific capacitance (5.79 mF·cm−2) than that of the pyrolyzed carbonbased MSC (1.67 mF·cm−2) and desirable cycling stability (93.3% capacitance retention after 5,000 cyclic voltammetry cycles). This novel microfabrication process is fully compatible with micromachining technologies, showing great potential for large-scale fine micropatterning of carbon-based composites for applications in micro/nano devices.

Graphical Abstract

Publisher

Tsinghua University Press

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