fullerene-like carbon film, fluorine doping, hydrophobicity, mechanical properties, tribological performance


Fluorine-incorporated hydrogenated fullerene-like nanostructure amorphous carbon films (F-FLC) were synthesized by employing the direct current plasma enhanced chemical vapor deposition (dc-PECVD) technique using a mixture of methane (CH4), tetra-fluoromethane (CF4), and hydrogen (H2) as the working gases. The effect of the fluorine content on the bonding structure, surface roughness, hydrophobic, mechanical, and tribological properties of the films was systematically investigated using Fourier transform infrared spectroscopy (FTIR), X-ray photoelectron spectroscopy (XPS), Raman analysis, atomic force microscope (AFM), contact angle goniometer, nano-indenter, and reciprocating ball-on-disc tester, respectively. The fluorine content in the films increased from 0 to 2.1 at.% as the CF4 gas flow ratio increased from 0 to 3 sccm, and incorporated fluorine atoms existed in the form of C–FX (X = 1, 2, 3) bonds in the film. The fullerene nanostructure embedded in the hydrogenated amorphous carbon films was confirmed by Raman analysis. The water contact angle was significantly increased because of fluorine doping, which indicates that the hydrophobicity of the carbon films could be adjusted to some extent by the fluorine doping. The hardness and elastic modulus of the films remained relatively high (22 GPa) as the fluorine content increased. Furthermore, the friction coefficient of the carbon films was significantly reduced and the wear resistance was enhanced by fluorine doping.


Tsinghua University Press